JPS6231508B2 - - Google Patents
Info
- Publication number
- JPS6231508B2 JPS6231508B2 JP54105311A JP10531179A JPS6231508B2 JP S6231508 B2 JPS6231508 B2 JP S6231508B2 JP 54105311 A JP54105311 A JP 54105311A JP 10531179 A JP10531179 A JP 10531179A JP S6231508 B2 JPS6231508 B2 JP S6231508B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- film
- type
- channel
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
- H10D84/401—Combinations of FETs or IGBTs with BJTs
Landscapes
- Junction Field-Effect Transistors (AREA)
- Local Oxidation Of Silicon (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10531179A JPS5629361A (en) | 1979-08-17 | 1979-08-17 | Manufacture of semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10531179A JPS5629361A (en) | 1979-08-17 | 1979-08-17 | Manufacture of semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5629361A JPS5629361A (en) | 1981-03-24 |
| JPS6231508B2 true JPS6231508B2 (en]) | 1987-07-08 |
Family
ID=14404150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10531179A Granted JPS5629361A (en) | 1979-08-17 | 1979-08-17 | Manufacture of semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5629361A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6451510U (en]) * | 1987-09-28 | 1989-03-30 |
-
1979
- 1979-08-17 JP JP10531179A patent/JPS5629361A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6451510U (en]) * | 1987-09-28 | 1989-03-30 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5629361A (en) | 1981-03-24 |
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